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THE HYBRID HEXAPOD® AND PARALLEL KINEMATIC MOTION

ALIO 사의 특허 받은 하이브리드 헥사포드로 6축까지 구성이 가능하며 초정밀도 작업에 매우 유용하게 사용될 수 있습니다.

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THE ALL-NEW MINI HYBRID HEXAPOD®

  • Travel XY/Z/AB/G:   60/15/10/360

  • Max. Linear and Angular Velocity:   25 mm/s and 30 deg/sec

  • Linear Resolution:< 5nm

  • Bi-Directional Repeatability:< ± 80nm

  • Displacement Accuracy:< 1 µm

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HYBRID HEXAPOD®

WITH LINEAR MOTOR DRIVE

  • Max. Travel XY/Z/AB/G:   Unlimited/206/40/360

  • Min. Travel XY/Z/AB/G:   60/6/5/360

  • Max. Linear and Angular Velocity:   500 mm/s and 180 deg/sec

  • Linear Resolution:< 5nm

  • Bi-Directional Repeatability:< ± 80nm

  • Displacement Accuracy:< 1 µm

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VACUUM HYBRID HEXAPOD®

WITH LINEAR MOTOR DRIVE

  • Travel XY/Z/AB/G:   100/24/12/360

  • Max. Linear and Angular Velocity:  500 mm/s and 180 deg/sec

  • Linear Resolution:< 5nm

  • Bi-Directional Repeatability:< ± 80nm

  • Displacement Accuracy:< 1 µm

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TRIPOD WITH 

LINEAR MOTOR DRIVE

  • Min. Travel Z/AB:   6mm / ±2 degrees

  • Max. Travel Z/AB:   206mm / ±22 degrees

  • Max. Linear and Angular Velocity:   500 mm/s and 180 deg/sec

  • Linear Resolution:< 5nm

  • Bi-Directional Repeatability:< ± 80nm

  • Displacement Accuracy:< 1 µm

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TRIPOD + ROTARY

WITH LINEAR MOTOR DRIVE

  • Min. Travel Z/AB/G:   6mm / ±2 degrees / Unlimited

  • Max. Travel Z/AB/G:   206mm / ±22 degrees / Unlimited

  • Max. Linear and Angular Velocity:   500 mm/s and 180 deg/sec

  • Linear Resolution:< 5nm

  • Bi-Directional Repeatability:< ± 80nm

  • Displacement Accuracy:< 1 µm

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