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NANO PRECISION MOTION SYSTEMS

ALIO 사의 나노 정밀 모션 기술이 집약된 고정밀 크로스 롤러 리니어 모터스테이지 제품입니다.

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LINEAR MOTOR MONOLITHIC XY

  • Travel: 30mm – 440mm

  • Velocity: up to 1m/sec

  • Resolution: < 5nm

  • Bi-Directional Repeatability: < ± 30nm

  • Displacement Accuracy: < 1 µm

  • Standard and Highly Dynamic Grades

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LINEAR MOTOR MONOLITHIC XY

  • Travel: 30mm – 440mm

  • Velocity: up to 1m/sec

  • Resolution: < 5nm

  • Bi-Directional Repeatability: < ± 30nm

  • Displacement Accuracy: < 1 µm

  • Standard and Highly Dynamic Grades

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LINEAR MOTOR STAGE

  • Travel: 25mm – 300mm

  • Velocity: up to 1m/sec

  • Resolution: < 5nm

  • Bi-Directional Repeatability: < ± 30nm

  • Displacement Accuracy: < 1 µm

  • Standard and Highly Dynamic Grades

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HIGH PRECISION MOTION SYSTEMS

ALIO 사의 합리적인 마이크론(μII) 모션 시스템으로 단일축은 물론 다축으로도 구성이 가능한 제품입니다.

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BALL RAIL WITH DC SERVO LINEAR MOTORS

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-S BALL RAIL WITH DC SERVO LINEAR MOTORS

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–W BALL RAIL WITH DC SERVO LINEAR MOTORS

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–SN BALL RAIL WITH DC SERVO LINEAR MOTORS

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–SNH BALL RAIL WITH DC SERVO LINEAR MOTORS

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–SBS BALL RAIL WITH DRIVE SCREW & DC SERVO ROTARY MOTORS

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